Introduction; Photolithography; Crystallography, Mask Design Wet and Dry Etching; Thin Film Deposition and Growth Electroplating, Molding, LIGA, Bonding and Sacrificial Processes, Polymer Processing and Rapid Prototyping, u-TAS: Fluid Control Components, Sample Handling, Separation Components and Detection, Cell Handling and Characterization Systems, Systems for Biotechnology and PCR, Miniature Biosensors, Biosensor Arrays and Implantable Devices Neural Interfaces, Microsurgical Tools, Microneedles, and Drug Delivery, Miniature Bioreactors and Microsystems for Tissue Engineering, Optical Biosensors, Packaging of Microfluidic and Optical Systems, Nanotechnology, Metrology.
Textbook
Manz and H. Becker, Eds., Microsystem Technology in Chemistry and Life Sciences, Springer- Verlag, NewYork, 1999.
Marc J. Madou, Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition, CRC Press;2nd edition, 2002